ROHM accelerometer is MEMS electrostatic capacitive type using Kionix™ Technology. It’s small 2 x 2 mm package and excellent for shock resistance and temperature characteristics. We have lineup of products for consumer application such as Mobile Products, Home Appliances, or Office Equipment and industrial application such as Factory Automation, Industrial Robots, or Machine Tools.
Kionix™ Technology is defined by the proprietary plasma micromachining process and the technology to hermetically seal at a wafer level by bonding the silicon lid wafer to the device wafer. The sense element that detects acceleration consists of a fixed electrode, a movable electrode, and a spring. These structures are formed on the silicon device wafer using ROHM’s proprietary plasma micromachining process which allows deep and high precision etching. Using advanced technology, the lid wafer is hermetically sealed to the device wafer with these formed structures resulting in the completion of the sense element. ROHM electrostatic capacitive MEMS are manufactured using Kionix™ Technology and delivers outstanding performance.
”Kionix™” is a trademark or a registered trademark of ROHM Co., Ltd.